Mechanical Booster Pump PRC Series

Mechanical Booster Pump PRC Series

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.




Maximum pumping speed50Hzm3/h(L/min)280(4670)500(8330)1000(16700)1500(25000)
Maximum suction pressure50HzPa1.2 x 1031.3 x 1031.2 x 103
60Hz9.3 x 1021.1 x 1039.3 x 102
Maximum allowable differential pressure50HzPa4.0 x 1037.3 x 1034.3 x 103
60Hz3.3 x 1036.0 x 1033.2 x 103
Ultimate pressure *1Pa4.0 x 10-16.7 x 10-1
Allowable drive pressurePa~1.0 x 105(atmospheric pressure start type)
Motor *2kW0.75(2)2.2(2)3.7(2)5.5(2)
Oil *3ULVOIL R-4
Oil quantityL0.71.51.9
Cooling methodWater cooling
Cooling waterPrimary side pressureMPa0.3
Inlet/outlet differential pressure VolumeMPa0.01<
Inlet/outlet differential pressure VolumeL/min23
Temprature *45 ~ 30
Inlet port JIS-B-2290VG80 / ISO80F(optional)VG80(optional)VG150(optional)
Outlet port JIS-B-2290VF80(optional)VF100(optional)
Weight totalkg5186118150
Standard roughing pump *5VD601VD901VS1501VS2401
Optionaladapter flange, atmospheric pressure start type (Inverter), lubrication oil, lubrication chamber evacuation

*1 Measured by Pirani vacuum gauge. It will be about 4.0 x 10-2Pa when measured by MacLeod vacuum gauge.
*2 AC200V (50Hz/60Hz), AC220V (60Hz), 3Phase. Other voltage is available upon request.
*3 Synthetic (R-7000) or fluorine oil (J25F) is selectable as option
*4 Please use it in the environment of no be dewy when the temperature of cooling water is low.
*5 erformance of these pumps could change depending on roughing pump. Above data is based on standard roughing pump.