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Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC’s acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.
| Model | PST-030CU/AU | PST-050CU/AU | PST100CX/AX | PST-110AU | PST-200CXII /AXII | PST-400 CXII/AXII |
| Evacuation speed to 1 x 10-7 | N2: 0.03m3/s Ar: 0.013m3/s | N2: 0.045m3/s Ar: 0.03m3/s | N2: 0.10m3/s Ar: 0.08m3/s | N2: 0.11m3/s Ar: – | N2: 0.20m3/s Ar: 0.105m3/s (AXII) 0.02m3/s (CXII) | N2: 0.36m3/s Ar: 0.19m3/s (AXII) 0.04m3/s (CXII) |
| Final pressure (Pa) | 10-9 | 10-9 | 10-9 | 10-9 | 10-10 | 10-10 |
| Operation pressure (Pa) *1 | <8.0×10-3 | <8.0×10-3 | <5.0×10-3 | <4.5×10-3 | <3.8×10-3 | <3.0×10-3 |
| Inner Volume | 6.7 X 10-4m3 | 1.37 X 10-3m3 | 3.3 X 10-3m3 | 6.5 X 10-3m3 | 11 X 10-3m3 | 14 X 10-3m3 |
| Number of pump elements | 1 set ※ anticommutative | 1 set ※ anticommutative | 1 set ※ anticommutative | 2 set ※Replaceable | 2 set ※Replaceable | 4 set ※Replaceable |
| Connection flange model | UFC070 | UFC114 | UFC152 | UFC152 | UFC203 | UFC203 |
| Applied voltage | DC+7.5kV | DC+7.5kV | DC+7.5kV | DC+7.5kV | DC+7.5kV | DC+7.5kV |
| Standard bake-out temperature | 250°C | 250°C | 250°C | 250°C | 250°C | 250°C |
| Weight (kg) | 9.5 | 12.8 | 37 | 36.5 | 65 | 124 |
| External dimensions W×D×H (mm) | 103×183×187 | 153×204×241 | 155×340×340 | 171x387x293 | 296x361x376 | 296x544x376 |
| Recommended Controller | GST-07L-B | GST-07L-B | GST-07L-B | GST-07L-B | GST-07L-B | GST-07L-B |
*1) During the time of use of the GST-07L-B Type Controller