sputter ion pump pst series

sputter ion pump pst series

Sputter ion pumps are one type of pump used to create ultra-high vacuum, and are used in many analyzers and accelerators.
ULVAC’s acter pumps are designed for developing new elements (acter elements) with improved evacuation characteristics at ultra-high and extremely high vacuum, and to optimize magnetic fields.




Evacuation speed to 1 x 10-7N2: 0.03m3/s
Ar: 0.013m3/s
N2: 0.045m3/s
Ar:  0.03m3/s
N2: 0.10m3/s
 Ar: 0.08m3/s
N2: 0.11m3/s
 Ar:  – 
N2: 0.20m3/s
Ar: 0.105m3/s (AXII)
0.02m3/s (CXII)
N2: 0.36m3/s
 Ar: 0.19m3/s (AXII)
0.04m3/s (CXII)
Final pressure (Pa)10-910-910-910-910-1010-10
Operation pressure (Pa) *1<8.0×10-3<8.0×10-3<5.0×10-3<4.5×10-3<3.8×10-3<3.0×10-3
Inner Volume6.7 X 10-4m31.37 X 10-3m33.3 X 10-3m36.5 X 10-3m311 X 10-3m314 X 10-3m3
Number of pump elements1 set 
※ anticommutative
1 set 
※ anticommutative
1 set 
※ anticommutative
2 set 
2 set 
4 set 
Connection flange modelUFC070UFC114UFC152UFC152UFC203UFC203
Applied voltageDC+7.5kVDC+7.5kVDC+7.5kVDC+7.5kVDC+7.5kVDC+7.5kV
Standard bake-out temperature250°C250°C250°C250°C250°C250°C
Weight (kg)9.512.8 3736.565124
External dimensions 
W×D×H (mm)
103×183×187153×204×241 155×340×340 171x387x293296x361x376296x544x376
Recommended ControllerGST-07L-BGST-07L-BGST-07L-BGST-07L-BGST-07L-BGST-07L-B

*1) During the time of use of the GST-07L-B Type Controller