Compact Sputter for Research & Development CS-L Series

Compact Sputter for Research & Development

CS-L Series

It is possible to arrange for various module conbination; Atmospheric cassette, Single piece, Atmospheric transfer, Vaccum transfer. Compact design integrated with control unit.

features

  • CS-L is suitable to various development testing. The system is controlled by the touch panel for the sputtering deposition, ultra high vacuum and substrate transfer.

Applications

  • Reserch & development
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