Small Capacity DC Power Supply DCS Series

DCS0052B

Small Capacity DC Power Supply

DCS Series

As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.

features

  • Improvement in output regulation (Operates in 1% to 100% of rated)
  • Wide range of output without tap changing
  • Two types of arc detection function are equipped
  • Countermeasure for extraneous noise by isolation (option)
  • Selectable from three types of operation mode (power / current / voltage)
  • Floating output up to +100V

applications

  • For Al, Ni and other metal sputtering processes

specifications

ModelDCS0052B
Maximum output power500W
Output rangePower5W~500W
Voltage80V~800V
Current0.0012A~1.25A
External dimensions (WDH) mm240 x 450 x 99
Weight9kg