Vacuum equipment

ULVAC’s base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.

Auto Leak Testing Sytem
Vacuum Evaporation System
Refrigerant Charging Machine
Vacuum Furnace
Oil Charging System
Vacuum Cooling
Vacuum Distrillation System
Vacuum Freeze dry Systems
Vacuum Roll Coater
Etching System
Sputtering Systems
Ion Implantation System
CVD System
Ashing System
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