High Performance Process Qulee HGM2 Series


High Performance Process Qulee HGM2 Series

Qulee HGM2 Series

ULVAC’s new “Qulee HGM2” residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity of all models at 2.5 × 10 -6A/Pa, Qulee HGM2.
Can meet the needs of various R&D and other vacuum system proce ss monitoring.(Ethernet compatible)


  • Most Appropriate for R&D Applications
    Offers highest sensitivity 2.5×10-6A/Pa (3.3×10-4A/Torr, 2.5×10-4A/mbar)
  • Communication interface Ethernet compatible
  • Integrated Display No need for PC
  • Simple Operation “One Click” function
  • Bake Out
    Max 250℃ (482℉) high temperature bake (300℃ (572℉) when the sensors are removed)
  • Degas Function Electron bombard degas
  • Maintenance
    Filament, ion source, and secondary electron multiplier are easy to replace
  • Protection and Maintenance Features
    Unit offers protection and maintenance of ion source and secondary electron multiplier Traceability of analysis tube (Japanese Patent No. 5016031)
  • Various Leak Tests are Available
    Helium leak test, air leak test, leak up
  • Total Pressure Measurement
    Capable of total pressure measurement (ionization gauge)
  • Qulee QCS is Included
    This software is included and compatible with (Windows 7/8/10)
  • Applicable Standard Conforms with CE


  • R&D such as thermal desorption gas analysis
  • Residual gas analysis for ultra-high vacuum pumping equipment, etc
  • Trace impurities in gas
  • R&D for photovoltaic field
  • Analysis of organic compound
  • Environmental measurements


Mass filter typeQuadrupole
Mass range1 ~ 200 amu1 ~ 300 amu
ResolutionM/ ΔM=1M(10% P.H.)
Detector typeFaraday cupSEMFaraday cupSEM
Sensitivity2.5×10⁻⁶ A/Pa4 A/Pa2.0×10⁻⁶ A/Pa4 A/Pa
3.3×10⁻⁴ A/Torr533 A/Torr3.3×10⁻⁴ A/Torr533 A/Torr
2.5×10⁻⁴ A/mbar400 A/mbar2.5×10⁻⁴ A/mbar400 A/mbar

Minimum datectable partial pressure

Approx. 10⁻⁹ PaApprox. 10-13PaApprox. 10⁻⁹ PaApprox. 10-13Pa
Approx. 7.5×10-12 TorrApprox. 7.5×10-16 TorrApprox. 7.5×10-12 TorrApprox. 7.5×10-16 Torr
Approx. 1×10-11 mbarApprox. 1×10-12 mbarApprox. 1×10-11 mbarApprox. 1×10-12 mbar
Maximum operating pressure1×10⁻²Pa
7.5×10⁻³ Torr
1×10⁻⁴ mbar
Filamentlr / Y₂O₃, 2pcs
Ionizing voltage25 ~ 70 eV(defalut:70eV)
Emission current0.1mA/0.5mA/1.0mA(default:0.5mA)
DEGASElectron bombard type 330V, 5mA
Total pressure functionCapable / 10⁻² ~ 10⁻⁵Pa
“One Click” functionCapable / He/H₂O/N₂/O₂/Any gas
“One Click” leak test functionCapable
Power inputDC24V±10% 50W
Weight(sensor unit / sensor)2.4kg/0.81kg
Maximum sensor operating temperature250℃(482℉)

Maximum bakeout temperature

(elsectronisc removed)

Operating temperature range10 to 40℃(50 to 104℉)
Operating humigity range15 ~ 80%(not condensing)
IP ratingIP30(sensor unit)
Power connectorMSTBV2.5/3-STF-5.08
Communication interfaceEthernet compatible
External input / output connectorD-sub15-pin (M2.6 screw)(eith option)
Communication connectorRJ45
External input / output signalAnalog input (0 to 10V)×2,External interlock input (pressure protection)×1,Error output ×1(FIL,SEM,RF,fault),Partial pressure setpoint output ×2(fault,alarm),Total pressure setpoint output ×1
SoftwareQulee QCS Ver.4.0 later (Windows 7/8/10)
Standard accessoriesPower connector,Communication cable (3m long),Software (install CD),Instruction manual (CD)

Option accessories

(cf. Qulee optional catalogue)

Communication cable (10,15,20,30,50m long), AC power adapter, USB-LAN adapter, Switing hub(8ports or 16ports), Input / output connector, Jacket heater, Carry case
Applicable standardCE

※Please prepare an AC/DC power supply or please purchase the AC/DC adapter of an option.