High pumping speed and Low power consumption. Dry vacuum pump Model is selectable with the optimum pumping speed according to the application.
High pumping speed High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced.
Low power consumption - ECO-SHOCK technology realizes low power consumption (C Type). - Power consumption at the ultimate pressure is the industry-leading 0.6kW or less(LS120A-C).
Low noise Built-in silencer achieves the noise level 61dB(A) or less.
No shaft sealing gas
C Type：Clean process (LS***A-C） Feature：Low power consumption model (with built-in ECO-SHOCK). Applications：For clean process such as air and N2 Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.
L Type：Light process（LS***A-L) Feature：Light process model (with surface treatment and purge function). Applications：For light process such as steam and volatile liquid medicine Vacuum drying / Freeze drying / Ashing / General industrial use etc.