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Oil Diffusion Pump PFL Series

Oil Diffusion Pump PFL Series

PFL-type oil diffusion pump is designed and manufactured based on our extensive research and manufacturing experience.
It is used in many high-vacuum production facilities, and its practical performance is highly appreciated.

FEATURES

  • Excellent pumping speed
  • Low back-streaming of the operating fluid
  • Minimized power required and fluid capacity to ensure low operating cost
  • Easy maintenance
  • Reliable pump body construction

specifications

ModelPFL-22PFL-36PFL-52
Pumping speed(L/sec)100003400070000
Ultimate pressure(Pa)*13.0×10-4
Maxium forepressure(Pa)166.716
Heating up time(min)406060
OilULVOIL D-11
Oil capacity(L)51327
Cooling water temperature(℃)19～25℃
Water connectionsRc 1/2×2Rc 1/2×2Rc 1/2×4
Rc 3/8×2
Water capacity(L/min)123850
Voltage200V / 3φ
Pump power(kW)8Start-Up 22
Normal 11		Start-Up 45
Normal 30
Heater typecolled elementcolled elementcolled element
Standard backing pump*2PMB-040C＋PKS-070
(PMB1200D＋PKS-030)		PMB-040C＋PKS-070
(PMB1200D＋PKS-070)
(PMB2400D＋PKS-070)		PMB-060C＋PKS-070×2台
PMB2400D＋PKS-070
Dimensions(mm)*3A4807251000
B63010222000
H133017322845
InletVG550VG900VG52相当inch
OutletVG150VG250VG350
Weight(kg)2906501400
Oil level gageビューポートビューポートビューポート
Themal switch option有り有り有り
Themal switch operating temperature(℃)180110110

 

Water Cooling Baffle(PFL)

ModelBW-22BW-36BW-52
Conductance(L/sec)140005400075000
Dimensions [mm]Dφ680φ1065φ1480
T101113165
t262835
Water connectionsRc 3/8Rc 3/8Rc 1/2
Water capacity
[L/min]		355
Weight [kg]2866200

*1 The ultimate pressure by an ionization gauge in the case of coolant temperature 20 degrees Ceisius.
*2 The backing pump chooses it for the maximum throughput of the diffusion ejector pump,but,in consideration of time of starting pressure,it is good to use a big backing pump.
*3 Please confirm other dimensions by CAD data placing in the ULVAC,Inc.website.