The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.
Main evacuation of middle to hard processes such as dry etching, CVD system, etc.
|Wide range and high throughput models||High back-pressure and high compression models||Inlet flange size||N2pumping speed(L/s) *1 *2|
|*1||Value measured in accordance with JVIS005 standard, or calculated value based on it|
|*2||Protective mesh isn’t used.|