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Turmo Molecular Pump UTM-FM/FH Series

Turmo Molecular Pump UTM-FM/FH Series

The UTM-FH and UTM-FW is compound turbo molecular using 5 axis magnetic levitation and digital controlled and realized advantages such as high performance and reliability and energy savings. The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle~hard processes.

Features

  • There is not limitation to combine any power supply and pump main unit to change cable length because of using coupling free system and tuning free system.
  • Variable speed system marks it possible to change the pumping speed in the rang from 25% through 100%.
  • Excellent anti-corrosion surface treatment. Optional special surface treatments (e.g. Nickel plating + cation electro-deposition, special deposited film, aluminum anodization) are available as necessary.
  • Optional internal heating system to control rotor temperature and reduce adhesion of side reaction by-products.
  • Safety design with fracture energy absorption construction can reduce damage on vacuum system when trouble happened with the pumps.

applications

Main evacuation of middle to hard processes such as dry etching, CVD system, etc.

specifications

Wide range and high throughput modelsHigh back-pressure and high compression modelsInlet flange sizeN2pumping speed(L/s) *1 *2
–UTM-6300FHVG5006300
UTM-3301FWUTM-3303FHVG3503300
UTM-2300FW–VG3002730
VG2502230
ICF3052110
UTM-1400FW–VG2501490
VG2001360
ICF2531300
UTM-1001FWUTM-1001FHVG2001000
ICF2531000
UTM-800FWUTM-800FHVG150810
ICF203740
UTM-480FWUTM-480FHVG150480
ICF203480
UTM-350FWUTM-350FHVG100350
ICF152330
*1Value measured in accordance with JVIS005 standard, or calculated value based on it
*2Protective mesh isn’t used.