The compound turbo molecular pump with the ceramic ball bearings,and has excellent compression ratio. Compact design by integrated controller design. Excellent high back pressure performance allows to use smaller backing pump.
|Cooling method||Natural air cooling||Forced air cooling（fan）|
|Inlet Flange *1||VG100, ICF152, ISO100-K|
|Pumping speed (without a protection screen)|
|Ultimate pressure (With 2stage back pump)|
|Max. compression rate||N2 : >1×109, He : 7×106, H2 : 1×105|
|Max. pressure at inlet of N2 *3, *4, *5|
|Max. pressure at outlet of N2 *3, *4, *6|
|Continuous running maximum flow *7|
when 120L/m backing pump is used
Without gas purge
Without gas purge
With gas purge
|Recommend backing pump (when evacuating 10SCCM) *8||>120L/min|
VG, ISO / ICF
|6kg / 9kg||6.3kg / 9.3kg|
|Start-up time (Up to 80) (DC24V. Back pressure: 5Pa or less).||3.5 min|
|Surface treatment *9||None|
|Mounting direction||All direction|
|Standard accessories||Each of instruction Manua (l English and Japanese), protection screen (for VG and ICF. Cap of ISO Flange is built into the gasket), gasket (for Inlet), dust cap (or Inlet, outlet and connector).|
*1 Inlet flange is from VG100, ICF152 and ISO100-K when ordering.
*2 Baking is available only for forced air cooling type with ICF flange.
*3 Value at the time of the ambient air temperature is 25℃. If ambient air temperature changes, an acceptable value will change.
*4 Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time.
*5 Maximum inlet port pressure which can accept continuous running.
*6 Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 mL/min.
*7 Value when ambient temperature is 5~25℃. In addition, N2 should be used for gas purge and its flow rate should be 0.4mbarL/sec(25sccm).
*8 Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases.
*9 Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases.
*10 This value is measured by ULVAC standard for ISO flange type.