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ULVAC’s vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
| Model | VLH-SB |
| Maximum allowable differential pressure on valve plate (Positive pressure/counter pressure) MPa | 0.10 |
| Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa | 0.10 |
| Plate seal | O-ring |
| Feedthrough | Bellows |
| Actuation | Manual |
| External leak rate*1 Pa・m3/s | ≦1.0E-10 |
| Internal leak rate*1 Pa・m3/s | ≦1.0E-10 |
| Operating pressure range (absolute pressure) Pa | Atm. ～ 1.0E-6 |
| Bakeout temperature (when stopping)*2 ℃ | Body：150*3， actuation：70 |
| Operating ambient temperature ℃ | 5～70 |
| Fluid temperature ℃ | 5～70 |
| Heating & cooling speed ℃/h | ≦30 |
| Operating ambient | Non-corrosive |
| Fluid | Non-corrosive |
| Compressed air to cylinder MPaG | ー |
| Warranted operation cycle*4 | 10,000 |
| Orientation | No limitation |
| Position indicator | ー |
| Material of major parts (Vacuum side) | Stainless steel 304 |
| Material of major parts (Atmosphere side) | Stainless steel 304, Aluminum-6061 (anodized aluminum) |
| Bellows material | Stainless steel 316L |
| Seal material (Vacuum side) | FKM |
| Grease (Vacuum side) | Any grease is not used |
| Attachment for lifting | None*5 |
| RoHS | Complied |
*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200?C (392F) and in closing position: 150?C (302F).
*4 See instruction manual for detail.
*5 Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).