vacuum valve vlh series


vacuum valve vlh series

vlh series

ULVAC’s vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.


Maximum allowable differential pressure on valve plate
(Positive pressure/counter pressure) MPa
Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa0.10
Plate sealO-ring
External leak rate*1 Pa・m3/s≦1.0E-10
Internal leak rate*1 Pa・m3/s≦1.0E-10
Operating pressure range
(absolute pressure) Pa
Atm. ~ 1.0E-6
Bakeout temperature
(when stopping)*2 ℃
Body:150*3, actuation:70
Operating ambient temperature ℃5~70
Fluid temperature ℃5~70
Heating & cooling speed ℃/h≦30
Operating ambientNon-corrosive
Compressed air to cylinder MPaG
Warranted operation cycle*410,000
OrientationNo limitation
Position indicator
Material of major parts (Vacuum side)Stainless steel 304
Material of major parts (Atmosphere side)Stainless steel 304, Aluminum-6061 (anodized aluminum)
Bellows materialStainless steel 316L
Seal material (Vacuum side)FKM
Grease (Vacuum side)Any grease is not used
Attachment for liftingNone*5

*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3  Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200?C (392F) and in closing position: 150?C (302F).
*4 See instruction manual for detail.
*5  Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).