ULVAC’s vacuum valves were developed based on a wealth of technology and experience in the vacuum field.
We offer a variety of products that meet a wide range of needs from atmospheric pressure to ultra-high vacuum.
|Maximum allowable differential pressure on valve plate|
(Positive pressure/counter pressure) MPa
|Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa||0.10|
|External leak rate*1 Pa・m3/s||≦1.0E-10|
|Internal leak rate*1 Pa・m3/s||≦1.0E-10|
|Operating pressure range|
(absolute pressure) Pa
|Atm. ～ 1.0E-6|
(when stopping)*2 ℃
|Operating ambient temperature ℃||5～70|
|Fluid temperature ℃||5～70|
|Heating & cooling speed ℃/h||≦30|
|Compressed air to cylinder MPaG||ー|
|Warranted operation cycle*4||10,000|
|Material of major parts (Vacuum side)||Stainless steel 304|
|Material of major parts (Atmosphere side)||Stainless steel 304, Aluminum-6061 (anodized aluminum)|
|Bellows material||Stainless steel 316L|
|Seal material (Vacuum side)||FKM|
|Grease (Vacuum side)||Any grease is not used|
|Attachment for lifting||None*5|
*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200?C (392F) and in closing position: 150?C (302F).
*4 See instruction manual for detail.
*5 Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).