Pirani Vacuum Gauge SP1 series

Pirani Vacuum Gauge SP1

Pirani Vacuum Gauge

SP1 Series

The sensor unit SP1 is an integrated pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4Pa (22 to 3 x 10-3 torr/ 3 to 4 x 10-3mbar).


  • Transducer spec
    If you don’t need a pressure display device:
    ・You can lower the costs associated with a vacuum gauge
    ・You can save space by minimizing the control panel
  • Replacing sensort heads is greatly simplyfied
  • Corrosion-resistant platinum is used for the filament material
  • You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16)
  • Able to output 2 set points
  • SP1: Pressure reading is a 0 to 5V output (non-linear)
  • Able to operate at 24VDC power input


  • Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.
  • Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
  • Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.


  • TypeSensor unit
    Compatible sensor headWP-01, WP-02, WP-03, WP-16



    ±15 %(51 Pa ~760 Pa)
    ±30 %(10 Pa ~1000 Pa)
    ±50 %(0.4 Pa ~3000 Pa)
    Operating temperature range10 ~ 40℃
    Measurement value outputNonlinear output: 0 to 5VDC (Max. 10V)
    Setpoint 1/2 Pressure setting adjustment monitorNonlinear output: 0 to 5VDC (Max. 10V)
    Control output signalOpen collector output, Negative logic
    ERROR signal
    Setpoint 1/2
    LED displayPower, error, set point 1, set point 2
    Power supply voltageDC24V±2V, 90mA(Max.)
    Input/Output connectorD-sub-15P(M2.6 screw)
    Weight190g /0.41lb (Excluding sensor head)

    Standard accessories

    Input/Output connector 1pc
    Quick manual 1pc

    IO and analog GND are not isolated from the power GND.