The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and ITO films. ULVAC has delivered a large number of these systems, for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.
|Substrate size (mm)||730 X 920||1200 X 1300||1300 X 1500|
|Chamber configuration||1) Loading/unloading chambers||2|
|2) Heating chambers||1||–|
|3) Transfer chambers||1|
|4) Sputter chambers||4||2 (Up to 2 cathodes)||2 (Up to 3 cathodes)||2 (Up to 2 cathodes)|
|High vacuum evacuation system||Cryopump|
|Substrate transfer system||1-level arm||2-level arm||2-level ar|