Sputtering System

sputtering system

Batch type

Batch-type Sputtering Systems SV Series
Batch-type Sputtering Systems SX Series

Load-lock type

Multi-chamber Sputtering System ENTRONTM-EX W300
Multi-chamber Sputtering System MLXTM-3000N
Optical Filters and Coating ULDiS Series
Backside Metalization Sputtering System SRH Series
Cluster-type Sputtrering System SME-200E
Load-lock type Sputtering System CS-200
Load-lock type Compact Sputter ACS-4000
Compact Sputter for Research & Development CS-L
Sputtering System Load-lock type Gemini-200,300

In-line type

Single-substrate Sputtering Systems SMD Series
Holizontal In-line Type Sputtering System SCH Series
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