Load-lock type Cluster-type Sputtrering System SME-200E

Load-lock type Cluster-type Sputtrering System

SME-200E Series

SME-200E is cluster type Sputtering system for research and development and production purpose.

 

features

  • Substrate size up to Φ200mm.
  • Process chamber up to three process chamber can be equipped.
  • Available for various application-specific process modules.
  • Substrate heating mechanism, simultaneous deposition and revolved deposition are available.

Applications

  • R&D
  • Production purpose
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