Batch-type Sputtering System SX Series

Batch-type Sputtering System

sx Series

Batch-type Sputtering System SX series is for batch type sputtering system for research & development and small production application.

features

  • Auto control for vacuum pumping and deposition by PC
  • Designed for co-sputtering method application (optional item by adding power supply)
  • Logging data by PC

Applications

  • Reserch and development
  • Small and medium production
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