Vacuum Furnace System

ULVAC offers vacuum furnaces (for melting, thermal treatment, and CVD) used in general industrial fields and semiconductor/electronic device fields.

Vacuum Heat Treatment Furnace FHV Series
Vacuum Sintering Furnaces FSC Series
Vacuum Heat Treatment Furnace FHH series
Vacuum Induction Melting Furnaces FMI Series
Vacuum Heat Treatment Furnace FB series
Vacuum Furnace System COMBAT Series
Vacuum Heat Treatment Furnace FHHn series
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