CVD System

ULVAC offers cluster-type and batch-type chemical vapor deposition systems and additionally offers systems specially designed for development, ranging from PE-CVD systems essential for a-Si and passive film deposition to metal CVD and thermal CVD systems.

CVD System ETP-CVD System ULGLAZE Series
Load-lock type Plasma-CVD System CC-200/400
Single-substrate Plasma CVD Systems CMD Series
Sputtering System Load-lock type Gemini-200,300
Carbon Nanotube Growth System CN-CVD-400
Cluster-type PE-CVD System CME-200E/400
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